Electron Microscope

Aberration Corrected Analytical Scanning Transmission Electron Microscope (S/TEM)

• Microscope: Thermo Fisher Themis Z
• Acceleration voltage: 60-300 keV (with monochromator)
• Electron source: High Brightness Schottky Field Emission Gun (X-FEG)
• Aberration corrector: Cs S-CORR Probe Corrector with higher order aberration correction (C5 and A5)
• EDS option: Super-X EDS detector
• EELS option: Gatan Continuum ER/1065
• Detectors: Ceta 16M with speed enhancement and EMPAD
• Additional capability: Tomography, Precession electron diffraction, Cryo holder, Protochips in-situ biasing + heating holder

Sample Preparation

FEI Helios Nanolab 600i Dual Beam FIB/SEM

• Elstar SEM column: 0.3 – 30 kV with < 1 nm resolution
• Sidewinder FIB column: 2 – 30 kV, 1 pA – 65 nA
• In-situ Pt deposition GIS
• Omniprobe AutoProbe 200 in-situ micromanipulator
• EDAX TEAM EDS and EBSD acquisition

FEI Helios G4 PFIB CXE Dual Beam FIB/SEM

• Elstar UC+ SEM column: 0.3 – 30 kV with < 1 nm resolution
• Plasma FIB 2.0 column: 2 – 30 kV, 1 pA – 2.5 µA
• In-situ Pt and C deposition GIS
• EasyLift in-situ micromanipulator
• EDAX TEAM and APEX EDS and EBSD acquisition